Silicon Nitride Si3N4
Silicon Nitride Ceramics offer high thermal, shock, and impact resistance. With it's exceptional thermal and shock resistance properties, combined with it's high strength, Silicon Nitride is a leading choice for high-temperature, high-load applications.
Applications
- Semiconductor Process Equipment
- General Industrial Machinery
- Heat resistance parts
Properties
| General Properties | Main Component Purity (wt%) | 90 | |
| Color | Gray | ||
| Density (g/cm3) | 3.25 | ||
| Water Absorption (%) | 0 | ||
| Mechanical Properties | Bending Strength (MPa) | 785 | |
| Young's Modulus (GPa) | 285 | ||
| Vickers Hardness (GPa) | 16 | ||
| Thermal Properties | Max.Operating Temperature (°C) | 1200 | |
| Coefficient of Thermal Expansion (1/°C×10-6) | RT~500°C | 3.5 | |
| RT~800°C | 4.2 | ||
| Coefficient of Thermal Conductivity (W/m×K) | 13 | ||
| Thermal Shock Resistance ΔT (°C) | 650 | ||
| Electrical Properties | Volume Resistivity | 25°C | 1016 |
| 300°C | 1014 | ||
| 500°C | 1011 | ||
| 800°C | 107 | ||
| Dielectric Constant | 10GHz | 8.3 | |
| Dielectric Loss (×10-4) | 25 | ||
| Q Factor (×104) | 0.04 | ||
| Dielectric Breakdown Voltage (KV/mm) | 14 | ||