Silicon Carbide Parts (CVD-SiC)

Temperature Controlling Semiconductors (Peltier Elements)

Our proprietary SiC film formation technology by the CVD method provides products are low cost while having high quality characteristics.

Ultra-High Purity, High Heat Resistance and High Wear Resistance Silicon Carbide Products from Original CVD Production Method

Ferrotec’s Admap SiC products are made with unique CVD-SiC technology, which has been cultivated for over 30 years. These materials have the characteristics of ultra-high purity, high corrosion resistance, high oxidation resistance, high heat resistance, and high wear resistance. It is now indispensable for semiconductor manufacturing, which requires such characteristics at low cost.

Ferrotec Advanced Ceramics Microsite

If you’re looking for more about Ferrotec’s Silicon Carbide products, you can find more detailed information on Ferrotec’s Advanced Ceramics web site. On the site, you’ll find a comprehensive resource, along with technical information about the specific product lines.

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ADMAP’s SiC products are founded in the proprietary CVD-SiC manufacturing technology developed by MES. Our products offer ultra-high purity, high anti-corrosiveness, high oxidation resistance, high heat resistance, and high wear resistance.

Solid CVD-SiC product manufacturing technology

Applying coating technology, we offer products constructed solely from dense SiC film structures. This technology can be applied to a wide variety of applications, from flat plates to complex structures. We have vast experience applying this technology in difficult operating environments, including semiconductor manufacturing equipment utilizing ultra-high temperatures and plasma.

Solutions

Centered on our proprietary CVD-SiC technology, we combine the analytical and design capabilities to become involved in projects from their inception in order to provide the best possible solution.

Solution examples

  • Large-scale parts development for a high-temperature annealing device (boat, holder, nozzle)
  • Developed narrow-pitch film cassette boat
  • Ultra-high purity SiC powder material
  • Larger parts for next generation

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