Precision Sputtering System Solutions for Thin Film Coating
Ferrotec’s MeiVac group is an industry leader in providing high-quality thin film manufacturing systems, components and process solutions. Ferrotec’s MeiVac systems have been developed as a high reliability, high uptime, expandable system platform for the deposition of thin alumina gap layers.
Advanced High-Precision Thin Film Sputtering Systems
From our top-of-the-line MCT-8000 Cluster Tool to the batch throughput 2480 RF Diode system, Ferrotec’s MeiVac group has a history of designing and building high-performance thin-film deposition systems for demanding market requirements.
Ferrotec MeiVac Microsite
If you’re looking for more about Ferrotec’s MeiVac system products, you can find more detailed information on Ferrotec’s MeiVac web site. On the MeiVac site, you’ll find a comprehensive resource, along with technical information about the specific product lines.
Precision MCT-8000 Cluster Tool
Developed as a high reliability, high uptime, expandable system platform, Ferrotec’s MeiVac MCT-8000 Cluster Tool was optimized for hard disk drive thin film head applications.
Precision 602 Single Wafer System
Ferrotec’s MeiVac 602 series sputtering system was developed as a high reliability, high uptime, expandable system platform for the deposition of thin alumina gap layers.
2480 RF Diode Batch System
Ferrotec’s MeiVac HEDA RF Diode sputtering system family was developed as a high throughput batch deposition system for thick alumina layers utilized in thin film heads for the magnetic storage industry.