SiFusion Polysilicon Furnaceware

Temperature Controlling Semiconductors (Peltier Elements)

SiFusion polysilicon furnaceware offers superior performance to previously available quartz and SiC consumables.

Greater Performance than Previously Available

All SiFusion products are constructed from high-purity polysilicon materials, offering the choice of purity, low maintenance, cost of ownership, and environmental impact. The product range includes components for all 200 mm and 300 mm vertical furnace applications.

SiFusion furnaceware is designed and manufactured for easy installation in the hot zone of all major OEM furnaces including Tokyo Electron (TEL), KE, Avisa and ASM.

Ferrotec SiFusion Microsite

If you’re looking for more about Ferrotec’s polysilicon furnaceware products, you can find more detailed information on Ferrotec’s SiFusion web site. On the e-beam site, you’ll find a comprehensive resource, along with technical information about the specific product lines.

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SiFusion Furnaceware Products

High Temperature Anneal Boats

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High Temperature Shelf boats

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Injectors

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Pedestals

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