SiFusion Polysilicon Furnaceware

Temperature Controlling Semiconductors (Peltier Elements)

SiFusion polysilicon furnaceware offers superior performance to previously available quartz and SiC consumables.

Greater Performance than Previously Available

All SiFusion products are constructed from 99.9999% high-purity polysilicon materials, offering the choice of purity, low maintenance, cost of ownership, and environmental impact. The product range includes components for all 200 mm and 300 mm horizontal and vertical furnace applications.

SiFusion furnaceware is designed and manufactured for easy installation in the hot zone of most major OEM furnaces including Tokyo Electron (TEL), KE, ASM, and others.

Ferrotec SiFusion Microsite

If you’re looking for more about Ferrotec’s polysilicon furnaceware products, you can find more detailed information on Ferrotec’s SiFusion web site.

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SiFusion Furnaceware Products

High Temperature Anneal Boats

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High Temperature Shelf boats

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